Characterisation of nanowire structures with scatterometric and ellipsometric measurements

نویسندگان

چکیده

Nanowire structures arranged in a hexagonal lattice are to be characterized terms of their diameter, height and pitch. A scatterometer an imaging Mueller matrix ellipsometer, which is combination commercial ellipsometer microscope, have been used as measurement tools. These measurements supported by numerical simulations using the finite element method characterize structure parameters.

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ژورنال

عنوان ژورنال: Epj Web of Conferences

سال: 2022

ISSN: ['2101-6275', '2100-014X']

DOI: https://doi.org/10.1051/epjconf/202226610003